微纳技术及应用研究组的科研方向为微纳加工新技术的开发和微纳加工技术的应用。微纳加工新技术的开发包括新型微纳加工方式和手段的开发以及单元技术的研究。微纳加工技术的应用包括利用微纳加工技术在微机电系统、微传感器、微执行器、微机器人、微能源及生命科学仪器等方面的应用。

研究组以国家的重大需求为导向，探索微纳米技术在微机电系统和生命科学仪器中的应用，在相关的应用领域开展新概念、新方法、新技术方面的前瞻性和基础性研究，研究的重点集中在微纳检测技术，微纳操作技术，微能量转换技术等方面。

   研究组自将立足知识创新和技术创新，结合研究所制定的能源、电力安全和电工理论新技术两大领域发展战略目标，将微纳技术应用到信息、能源、电力、生命科学和健康保健等领域，以满足半导体企业、信息产业、能源、环境、生命科学和人口健康等领域对微纳技术的需求。

Introduction 

Micro and nanotechnology (MNT) plays an important role in the development of science and society, as well as the innovation of existing technologies. The development of MNT has intersected and cooperated with a wide range of scientific and technological disciplines, such as life science, material, environmental protection, healthcare, clean energy etc.  

The research scope of MNT and Application Department covers two aspects basically. One is to develop new methods of micro and nanofabrication, or to improve the precision of traditional techniques. The other is to apply the micro and nanofabrication technique in micro systems, such as MEMS, micro sensor, micro actuator, micro robot, micro power and so on.

Based on the development strategies of the Institute of Electrical Engineering in the past, the department is aimed for the innovative concepts, basic research and advanced technologies in the field of MNT, i.e. the phenomena and structures that can only occur at micro and/or nanometer scale. At present, we are mainly engaged in the research on micro/nano detection, micro/nano manipulation and micro power.