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Faculty
| Name | Chu Mingzhang |
Date of Birth | 1973.1.4 |
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| Sex | Female |
Degree | Bachelor of engineering |
| Place of Birth | |
Professional Title | Engineer |
| Tel | 010-82547177 |
Administrative Title | |
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E-mail | mzhchu@mail.iee.ac.cn |
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| Research Directions:Mechanical design and manufacture | Education and Work Experiences:Sept.1992 to Jun.1997, studied in the department of modern mechanical and electronic engineering, Beijing Polytechnic University, majored mechanical designing.
Jul.1997 to Present, working at Institute of Electrical Engineering in Chinese Academy of Sciences (CAS) as a mechanical engineer. | | Projects:participate in the research of electron beam micro-nano fabrication technology. | Main Achievements:Patent:
1、rectangular vacuum valve, has Patent-right
2、vacuum bolt | Publications:1、Analysis for Experimental Results of EBPL System
2、Ion Beam Lithography Technology
3、Design and application of motive sealing to vacuum lock |
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